FLUID CONTROL VALVE AND FLUID SUPPLY/EXHAUST SYSTEM

摘要

The invention relates to a fluid control valve which controls a fluid moving through a valve body (121) by means of opening and closing a portion between a valve seat (112) and a valve holder (126) using a drive unit (28), wherein: said drive unit (28) comprises a rod shaped shaft (108) for applying pressure via said valve holder (126) and a valve rod (109), and a member a (104) which is affixed around said rod shaped shaft (108), said member a (104) comprises a magnetic material, and a coil (102) having a space between it and the shaft and provided at a position parallel to said shaft (108) moves said member a (104) upwardly and downwardly by electromagnetic induction, and using the force of a spring (115), thereby opening and closing the portion between said valve seat (112) and said valve holder (126), and a means is provided for adjusting a gap G between said coil (102) and said member a (104).