| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for inspecting the change of a slide contact surface by detecting the microscopic destruction generated in the slide contact surfaces of two members such as the magnetic head and magnetic disk of a magnetic recording apparatus by AE detection, measuring surface roughness, the abrasion of a protective film and the thickness of a lubricating oil membrane by the scattered beam and reflected beam of laser beam, and further detecting the generation state or the like of chemical emission, discharge and microplasma by the discharge of charged particles, and to provide an apparatus for the method. SOLUTION: A contact surface change inspection means detects the acoustic emission and charged particles generated on the slide contact surface with two objects to be inspected, and also detects scattered beam and reflected beam generated by irradiating the slide contact surface with laser beam.
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