| 摘要 |
PROBLEM TO BE SOLVED: To provide a Fabry-Perot filter capable of ensuring the designed value of an initial gap corresponding to the thickness of a sacrificial layer by preventing the flexure of support parts. SOLUTION: The Fabry-Perot filter has a fixed mirror formed on a substrate and a movable mirror formed on the fixed mirror by way of a sacrificial layer whose vertical section shape is nearly trapezoidal, supported by support parts formed on the non-parallel parts of the sacrificial layer by removing the sacrificial layer and disposed opposite to the fixed mirror while forming a gap between the movable mirror and the fixed mirror, and the length of the gap is variable by displacing the movable mirror with respect to the fixed mirror. In the Fabry-Perot filter, reinforcing films which reinforce the support parts of the movable mirror have been disposed on the support parts.
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