PLASMA TREATMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To substantially eliminate the influence of gaseous fluorine and fluorine radicals and to permit internal observation at a good visual field for a long period of time. SOLUTION: The top surface of a vacuum chamber 12 forming a deposition chamber 10 is provided with a view port 31 for monitoring the inside of the deposition chamber by hermetically fitting a hole section 32 with a window section 33 made of glass. The inside surface side of the window section 33 constituting the view port 31 for monitoring the inside of the deposition chamber is provided with a coating layer 37 formed by vapor deposition of MgF2 having excellent corrosion resistance to the gaseous fluorine and fluorine radicals.