发明名称 METHOD AND APPARATUS FOR MAKING QUARTZ GLASS BODY
摘要 PROBLEM TO BE SOLVED: To provide a method of making a quartz glass body having material characteristics as uniform as possible. SOLUTION: In the known method of making the quartz glass body, a silicon- containing starting compound is supplied to a burner (7) for deposition and SiO2 particles are formed from this compound in a burner flame (6). The particles are deposited on a deposition surface (9) of a cap shape of a carrier (2) rotating around a central shaft (3) and are vitrified during the formation of the quartz glass body (8). The distance between the burner (7) for deposition and the deposition surface is controlled. The making of the quartz glass having the material characteristics as uniform as possible in compliance with a VAD process is made possible by means of maintaining the geometrical shape of the deposition surface during the deposition by this method. The apparatus for making the quartz glass body in such a manner that its reformation is possible is provided with means (11; 12; 17; 19; 37; 38) in order to maintain the geometrical shape.
申请公布号 JP2002211936(A) 申请公布日期 2002.07.31
申请号 JP20010359800 申请日期 2001.11.26
申请人 SHINETSU QUARTZ PROD CO LTD;HERAEUS QUARZGLAS GMBH & CO KG 发明人 TROMMER MARTIN;SCHAEFER JUERGEN;BAUSCHER HEINZ;ENGLISCH WOLFGANG
分类号 C03B8/04;C03B19/14;C03B20/00;(IPC1-7):C03B8/04 主分类号 C03B8/04
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