PRODUCTION METHOD FOR PYROELECTRIC INFRARED RAY DETECTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a production method for a pyroelectric infrared ray detector element capable of detecting infrared ray by using a pyroelectric material and realizing lowering cost by improving the yield of the infrared detector element and the resulting yield of the elements per substrate. SOLUTION: The pyroelectric infrared ray detector element is constituted, as a whole, of an infrared ray receiver consisting of a first electrode 12a, a thin film pyroelectric material 13 and a second electrode 12b and a holder holding the receiver. For separating the plurality of detector elements, slits are formed on the back surface of the substrate 11 and the substrate is separated along the slits from the substrate surface side where is the infrared ray receiver.