| 摘要 |
PROBLEM TO BE SOLVED: To enhance the precision for the liquid quantity of a moisture sensitive film solution or the thickness of a moisture sensitive film while miniaturizing a sensor to stabilize the humidity measurement characteristic. SOLUTION: In this humidity sensor, a pair of interdigital electrodes 14 having detecting electrode parts 14A having a plurality of comb-teeth at the tip sides, respectively, is provided on a ceramic substrate 12A. A pair of liquid repellent members 20 is arranged around the detecting electrode parts 14A on the ceramic substrate 12A. The surface part of the ceramic substrate 12A including the part having the detecting electrode parts 14A formed thereon between the liquid repellent members 20 is covered with the polymeric moisture sensitive film 16 absorbable of the moisture in the atmosphere.
|
