| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope having a plurality of electrically independent probes, capable of operating a micro-material having the size below 100 nm, and electric measurement thereof. SOLUTION: This scanning probe microscope is characterized by having the electrically independent plural probes 10a, 10b or the like, among which two or more probes 10a, 10b or the like are nanotube probes and one or more probes 10a, 10b or the like are equipped with image observation function.
|
