发明名称 METHOD OF MEASURING SHAPE, AND METHOD OF MANUFACTURING HIGHLY PRECISE LENS
摘要 PROBLEM TO BE SOLVED: To provide an aspherical shape measuring method for measuring an aspherical lens precisely, and a highly precise lens manufacturing method. SOLUTION: In this shape measuring method wherein a phase difference by interference between reflected light from a surface to be examined and reflected light from a Fizeau surface is detected by a detector to measure the shape of the surface to be examined, the surface shape of the surface to be examined is measured by correcting a shape difference from a desired design value of a reference standard to a shape difference with respect to the reference standard of the surface to be examined calculated based on a phase distribution measuring process for the surface, a phase distribution measuring process for a prescribed reference standard, and a phase distribution measured by the two processes, the shape difference from the desired design value of the reference standard is expressed by a rotation-symmetric error component and a non-rotation-symmetric error component, and the rotation-symmetric error component is expressed by a rotation-symmetric error higher-component and a rotation-symmetric error lower-component out of a difference between a phase distribution of a calibration standard preliminarily measured, and a phase distribution of the reference standard.
申请公布号 JP2002213930(A) 申请公布日期 2002.07.31
申请号 JP20010336084 申请日期 2001.11.01
申请人 NIKON CORP 发明人 NAKAYAMA SHIGERU;TAKIGAWA YUICHI;GENMA TAKASHI
分类号 G01B11/24;G01M11/00;(IPC1-7):G01B11/24 主分类号 G01B11/24
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