| 摘要 |
PROBLEM TO BE SOLVED: To provide a new method of detecting leakage from vacuum chamber by which the leaking spot of a vacuum chamber can be searched and specified more concretely and quickly, and to provide a detection gas blowing device used for the method. SOLUTION: A duplex pipe structure is constituted by putting an external pipe 8 around a nozzle 7 which blows a detection gas G upon the surface of the vacuum chamber 1 at a prescribed interval and, at the same time, an aspirator 10 which is used to suck a gas existing in the periphery of the nozzle 7 from the front-end opening of the pipe 8 is connected to the pipe 8. Consequently, the leaking spot of the chamber 1 can be searched and specified more concretely and quickly, because the detection gas G can be blown upon the surface of the chamber 1 in the state of a pin point by suppressing the spread of the gas G blown upon the chamber 1 from the nozzle 7.
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