| 摘要 |
<p>A process for forming a passivated film which is far reduced in the amount of gas discharge and can desorb an adsorbed gas more readily, which process comprises heating a stainless steel member with a surface roughness, Rmax, of 1.0 νm or less in an atmosphere of a mixture comprising oxygen gas and an inert gas and having a dew point of -95 °C or below, an impurity concentration of 10 ppb or less and an oxygen content of 5 ppm to 25 vol % at 300 to 420 °C.</p> |
