| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electron spectroscope capable of measuring a surface potential by Eonset measurement and measuring the accurate peak position of an Auger spectrum. SOLUTION: This electron spectroscope is provided with an electron irradiation device 1 irradiating a sample 2 mounted on a sample stage with an electron beam, an electron spectrometer 3 spectrally detecting secondary electrons or Auger electrons emitted from the sample, and a bias voltage application control device 5 applying a bias voltage to the sample. The Auger spectrum or surface potential of the sample is measured based on the spectral detection output of the electron spectrometer. The bias voltage application control device 5 is controlled by a host computer 6 so that the prescribed bias voltage is applied to the sample for measuring the surface potential and no bias voltage is applied to the sample or measuring the Auger spectrum.</p> |
