| 摘要 |
PROBLEM TO BE SOLVED: To provide a slide device, capable of smoothly sliding a linear bearing even in a high temperature atmosphere, even if the accuracy of an installing surface of the linear bearing on a table is not so high. SOLUTION: In this slide device, the table 10 is tiltably supported to the installing surface 8A of the linear bearing 8 by a spherical surface 27 on the tip of a support member 28, and is fastened to the linear bearing 8 by bolts 23 and 24, so as to allow the prescribed tilting. Thus, application of deformation load to the linear bearing can be avoided due to the fastening of the table and the linear bearing, since the table 10 tilts in an attitude along the installing surfaces, even if the planarity accuracy of the installing surface 8A and 10C of the linear bearing 8 and the table 10 is not so high.
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