| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink jet recording head in which a channel forming substrate can be made thin while being protected against damage and good ink ejection characteristics can be sustained, its manufacturing method and an ink jet recorder. SOLUTION: The ink jet recording, head comprises a nozzle plate 20 through which nozzle openings 21 are bored, a channel forming substrate 10 in which pressure generating chambers 12 communicating with the nozzle openings 21 are defined, and a piezoelectric element 300 comprising a lower electrode 60, a piezoelectric layer 70 and an upper electrode 80 formed in a region of the channel forming substrate 10 corresponding to the pressure generating chambers 12 through a diaphragm. The nozzle plate 20 and the channel forming substrate 10 are composed of single crystal silicon and they can be bonded well through a silicon oxide film 100 without using any adhesive.
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