ORGANOTITANIUM COMPOUND AND RAW MATERIAL SOLUTION CONTAINING THE SAME, AND TITANIUM-CONTAINING DIELECTRIC THIN FILM PRODUCED FROM THE SAME

摘要

PROBLEM TO BE SOLVED: To obtain an organotitanium compound having a high solubility in an organic solvent, capable of obtaining a high film-forming rate, and excellent in heat stability and vaporization stability, a raw material solution containing the same compound, and a titanium-containing dielectric thin film. SOLUTION: This organotitanium compound is expressed by formula (1): [Ti(OR1)2(dmhd)2] [wherein R1 is a 3-10C straight chain or branched alkyl; and dmhd is 2,6-dimethyl-3,5-heptanedione residue expressed by formula (2)].