ORGANOTITANIUM COMPOUND, RAW MATERIAL SOLUTION CONTAINING THE SAME AND TITANIUM-CONTAINING DIELECTRIC THIN FILM

摘要

PROBLEM TO BE SOLVED: To obtain an organotitanium compound having a high solubility in an organic solvent, capable of obtaining a high film-forming rate, and excellent in heat stability and vaporization stability, and a raw material solution containing the same compound. SOLUTION: This organotitanium compound is expressed by formula (1): [Ti(O-iPr)2(dmhd)2] [wherein, dmhd is 2,6-dimethyl-3,5-heptanedione residue expressed by formula (2)].