| 摘要 |
PROBLEM TO BE SOLVED: To provide an instrument for measuring precisely the thickness, for example, of a laminate such as a printed circuit board and a copper-clad laminate, or of a relatively thin sheet member. SOLUTION: In this thickness measuring instrument including a surface plate 3 for supporting the sheet member of which the thickness is measured, and a probe member 7 provided with a linear scale 6 for applying pressing force along a thickness direction of the sheet member and for measuring the thickness, the surface plate 3 is constituted of a glass material having a surface roughness Rmax less than 0.3μm, and a waviness WCM less than 0.3μm, paying attention to the fact that the surface roughness and the waviness of the surface plate bring a measuring error.
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