Single lens turnable wavelength division multiplexing fabry-perot filter using MEMS technology

摘要

Fabry-Perot filters are disclosed. having micro-electro-mechanical systems (MEMS) parts operable for tuning of the filters. The filters of the present invention are particularly useful in WDM and DWDM optical communication systems for multiplexing and demultiplexing channels of electromagnetically-carried data traversing the system. The filter can be miniaturized by etching or photolithographing the filter on silicon wafers utilizing MEMS technology. A MEMS device fabricated on the wafer is operative for moving a variably positioned mirror to change the length of the cavity or etalon of the Fabry-Perot filter, thereby tuning the filter to multiplex or demultiplex the channels.