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发明名称
Reduced aspect ratio digit line contact process flow used during the formation of a semiconductor dram device
摘要
申请公布号
AU2002243538(A1)
申请公布日期
2002.07.30
申请号
AU20020243538
申请日期
2002.01.15
申请人
MICRON TECHNOLOGY, INC.
发明人
BRENT A. MCCLURE
分类号
H01L21/02;H01L21/768;H01L21/8242;H01L27/108;(IPC1-7):H01L21/824
主分类号
H01L21/02
代理机构
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