| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor container conveying device (handier) capable of easily coping with the conveying of a semiconductor container (tray) in the handler without replacing and adjusting a jig in changing the kind or the like. SOLUTION: A suction hand 5 is composed of a suction pad 4 mounted to place a suction port at a center of a square elastic body, and a spring 6 for pressing the suction pad 4, The suction pad 4 is abutted on an upper face of the circumference of an IC pocket of the tray, moves the suction hand 5 to a position to sealing the shielded IC pocket 2, and sucks the tray. The suction hand is mounted on a robot of variable position setting. Whereby high suction force can be obtained even to a member of complex surface shape such as the tray, regardless of a suction diameter, and only the position setting of the robot is changed without executing the mechanical adjustment and the replacement of the jig when the kind of a sucked member is changed. |
