SURFACE PLATE WITH SUCTION MECHANISM

摘要

PROBLEM TO BE SOLVED: To fix a substrate with suction down to the periphery thereof irrespective of the dimensions of the substrate as an object of suction. SOLUTION: A surface plate with a suction mechanism, which is used to position and fix the platelike substrate on a stage S when the substrate is worked, has in the stage S a plurality of suction holes 2 and a plurality of suction grooves 1 for fixing the substrate with suction. A change in the pattern of suction according to the size of the substrate can fix the substrate with suction down to the periphery thereof irrespective of the dimensions of the substrate as an object of suction.