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发明名称
METHOD AND APPARATUS FOR TRANSFERRING ARTICLES BETWEEN TWO CONTROLLED ENVIRONMENTS
摘要
申请公布号
EP0556193(A4)
申请公布日期
1993.11.03
申请号
EP19910916767
申请日期
1991.09.12
申请人
ASYST TECHNOLOGIES
发明人
BONORA, ANTHONY, C.;GUERRE, GILLES;PARIKH, MIHIR;ROSENQUIST, FREDERICK, T.;JAIN, SUDHIR
分类号
B65G49/07;G03F7/20;H01L21/677;(IPC1-7):B65B1/04
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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