| 摘要 |
PURPOSE:To obtain a capillary having excellent high temperature strength and thermal shock resistance, and to lessen the chipping and abrasion by a method wherein, for a capillary for wire bonding, at least its tip part is formed with Al2O3-TiC ceramic. CONSTITUTION:A capillary 1 consists of a cylindrical main part 2 and a conical tapered part 3, and a fine hole 1a, with which a conducting wire is sent out to the tip part of the capillary, is provided and the capillary is formed by Al2O3- TiC ceramic. Accordingly, as the adhesion of metal to the capillaryl is little, the Al powder, electrode power, dust and the like are not adhered to the capillary 1, and the capillary has moderate conductivity. As a result, electrode powder and dust are not adhered to the tip surface of the capillary 1 by static electricity. Also, the capillary 1 has excellent high-temperature strength and thermal shock resistance, it has excellent heat dissipation, and the cracks due to heat shock can also be prevented. |
