| 摘要 |
PROBLEM TO BE SOLVED: To improve the efficiency of the oscillating operation and make the oscillation amplitude high. SOLUTION: A piezoelectric body 2 is formed by the gas deposition method on a metal oscillator made of Al, Al alloy, stainless steel or other metal than Ti, without using a resin of epoxy adhesives, etc. To improve the adhesion and PZT crystallinity, an intermediate layer 3 made of Ti, TiN or TiO2 , is provided. |
