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发明名称
METHOD OF MODIFYING STRESSES IN SEMICONDUCTOR STRUCTURES
摘要
申请公布号
PL345144(A1)
申请公布日期
2002.07.29
申请号
PL20010345144
申请日期
2001.01.16
申请人
INSTYTUT TECHNOLOGII ELEKTRONOWEJ
发明人
ADAMCZEWSKA JOLANTA;BAK-MISIUK JADWIGA;DOMAGALA JAROSLAW;KANIEWSKI JANUSZ;MISIUK ANDRZEJ;PRUJSZCZYK MAREK;REGINSKI KAZIMIERZ
分类号
H01L21/324;(IPC1-7):H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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