| 摘要 |
<p>PURPOSE: To avoid an unstable step due to defective junction of tubing for facilitating the handiling thereof by a method wherein one end of the tubing is closed to form two aperture parts near the end while the other end is conically formed further to form the other aperture part. CONSTITUTION: The tube device is composed of a cylindrical tubing 11 formed of a door for mounting a semiconductor wafer while one end of the tubing 11 is closed to form two aperture parts 12, 13 near the closed end but the other end is conically shaped further to form the other aperture part 15. Besides, the tube device includes a saddle 14 having two aperture parts to be fitted on the tubing 11 so that the two aperture parts may coincide with said two aperture parts 12, 13. Furthermore, the aperture part 15 is specified to be a reaction gas running-in port, while one aperture part out of the two aperture parts 12, 13 to be a nitrogen running-in port and the other aperture part to be a gas discharging port.</p> |
