| 摘要 |
optical engineering. SUBSTANCE: method involves coating substrate transparent in spectral range of 0.4- 0.7 mcm with light-transmitting titanium layer, 0.028-0.03 mcm thick, and antireflection layer. Used as antireflection layer is titanium TiOx at 1 <x <2, where x is degree of titanium oxide oxidation with absorption index of 0.17-0.2 and geometric thickness of 0.04-0.045 mcm by spraying titanium oxide TiO2 in high-frequency induction discharge chamber under dynamic vacuum at a pressure of 0.1-100 Pa. Such procedure provides for synthesizing coating with desired absorption and for dispensing with high-vacuum equipment. EFFECT: reduced number of layers, integral reflectivity, and manufacturing time of filter. 3 dwg |
