TRANSPORTATION-TYPE SUBSTRATE TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a transportation-type substrate treatment device where the side edge face of an Al layer is formed in a gentle inclined face fitted to the lamination of a next layer by applying it to Al etching. SOLUTION: Slit nozzles 35 supplying treatment liquid in the whole area of a width direction on the surface of a substrate in a film shape are arranged in one stage or a plurality of stages on the down stream side of a shower unit 34 supplying treatment liquid to the whole surface of the substrate 100 from many spray nozzles 34a. A paddle state where treatment liquid is thinly loaded on the surface of the substrate 100 is realized by a chemical knife treatment by using the slit nozzles 35.