发明名称 |
METHOD FOR REMOVAL OF SURFACE ROUGHNESS OF METAL WIRING AND METHOD FOR FORMATION OF METAL WIRING ONTO TFT ARRAY |
摘要 |
PROBLEM TO BE SOLVED: To effectively remove surface roughness formed on the surface of a metal wring after a wet etching operation in a semiconductor manufacturing process. SOLUTION: A tetramethylammonium hydroxide(TMAH) solution is applied to the rough surface of the metal wiring, and it is placed still for a prescribed time. After that, the metal interconnection is cleaned, and the TMAH solution left on the surface of the metal wiring is removed. |
申请公布号 |
JP2002208594(A) |
申请公布日期 |
2002.07.26 |
申请号 |
JP20010331761 |
申请日期 |
2001.10.30 |
申请人 |
HANNSTAR DISPLAY CORP |
发明人 |
SUN CHIH-CHUNG;CHANG YAO-CHUNG |
分类号 |
G02F1/1343;B44C1/22;C23F1/00;C23F3/00;C23F3/02;G02F1/1362;H01L21/308;H01L21/3205;H01L21/336;H01L21/77;H01L29/786;(IPC1-7):H01L21/320;G02F1/134 |
主分类号 |
G02F1/1343 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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