发明名称 METHOD FOR REDUCING VIBRATION IN LIQUID COOLING SYSTEM, CHARGED PARTICLE BEAM EXPOSURE SYSTEM, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for reducing vibration of a structure contained in a vessel, in a system in which the structure is cooled by a liquid refrigerant introduced into the vessel. SOLUTION: At least three pieces of balloons 6 are disposed rotation- symmetrically with respect to the central axis of a lens. As a replacement for the balloons provided separately, a toroidal balloon many also be employed. A large difference exists in the rigidities of the refrigerant and air. Air exhibits a father more softness than the refrigerant. Accordingly, when the balloons 6 are sunk under the refrigerant 4 as shown (b), the balloons 6 relax pressure fluctuation of the refrigerant 4. When the balloons 6 are placed in the vicinity of the structure of an electromagnetic lens 2, the vibration is relaxed in those parts, and the vibration can be prevented from being transferred to the lens 2.
申请公布号 JP2002206833(A) 申请公布日期 2002.07.26
申请号 JP20010000281 申请日期 2001.01.05
申请人 NIKON CORP 发明人 NAKANO KATSUSHI
分类号 G03F7/20;F16F15/02;F25D3/10;G03F7/22;H01J37/16;H01J37/305;H01L21/027;(IPC1-7):F25D3/10 主分类号 G03F7/20
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