| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump capable of preventing heating of reaction byproducts in the inside of the pump. SOLUTION: A rotor 12, having a screw groove, is arranged in a casing 11 to discharge the gas with the rotation of the rotor. In a screw type dry vacuum pump with this structure, the shape of the casing 11 for covering the peripheral part of the rotor is formed shorter than the rotor at a discharge end part (coded item 21).
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