| 摘要 |
PURPOSE: To realize installation of a control program to the controller of a semiconductor fabrication equipment by transmission without inhibiting the operation of the equipment. CONSTITUTION: This system has a controller 31 which controls the action of the semiconductor fabrication equipment by executing a control program. The controller 31 provides at least a judging function 48 which judges a time when switching is possible except a process event P, and a memory access function 49 which practicably memorize the control program received through communication lines N, 38 and 36 in a memory 46 according to a decision results. Thus, a new control program provided from control server 50 through communication line is automatically down loaded to a controller 31 without generating temperature change at the process event.
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