| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam device equipped with a mobile stage device which can continuously move at high speed with movement accuracy secured. SOLUTION: With the electron beam device 100, a main stage 3 is supported on a stage counter 2 through a non-contact bearing, and a sub-stage 5 moves in conjunction with the main stage 3 toward a given direction, the main stage 3 and the sub-stage 5 coupled with a stage-combining part 9 in free relative movement, and further, a wiring and piping part 8 is provided with a mobile stage device coupled with the sub-stage 5, at least one primary optical system irradiating a plurality of primary electron beams on a sample, and at least one secondary optical system leading the secondary electrons to at least one detector. The plurality of the primary electron beams are all irradiated on a place away from the distance limit of resolution of the second optical system.
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