| 摘要 |
PROBLEM TO BE SOLVED: To reliably put a work under a helium leak test within the atmosphere release allowable time. SOLUTION: This leak testing system is provided with a pre-processor 10 putting the work W in the pressurized helium atmosphere, a lead testing device 50 performing the helium leak test on the work W, a transfer mechanism 40 carrying out the work W from the pre-processor 10 and setting it on the leak testing device 50, and a controller 90 controlling the devices 10 and 50 and the mechanism 40. The controller 90 adjusts the carrying-out timing of the work W according to the degree of progress of the leak test by the leak testing device 50.
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