发明名称 HEATING LAMP AND HEAT TREATMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a heating lamp heating an object with high efficiency, realizing a heat treatment with uniformity, and to provide a heat treatment device equipped with the above heating lamp. SOLUTION: The heating lamp heating the object by radiation of light comprises a ceramic base socket 25 to which, two electrodes 26 are mounted, a linear filament 23 of which, both end parts are connected to the electrodes 26 respectively, and a glass tube 22 enveloping the filament 23 by planes which are parallel with the filament 23, and sealed with the ceramic base socket 25.
申请公布号 JP2002208466(A) 申请公布日期 2002.07.26
申请号 JP20010000782 申请日期 2001.01.05
申请人 TOKYO ELECTRON LTD 发明人 BAKU KUMO
分类号 H05B3/44;H01K1/14;H01K1/28;H01K1/32;H01L21/205;H01L21/26;(IPC1-7):H05B3/44 主分类号 H05B3/44
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