摘要 |
PROBLEM TO BE SOLVED: To provide a load detector of high detecting accuracy. SOLUTION: A sensor head 31, a bellows 32, a housing 33 and a stem 34 define a sensor chamber as a closed space. A liquid 38 is sealed in the sensor chamber formed by them and a sensor chip 35 for detecting pressure is also contained therein. This arrangement allows the bellows 32 to be shrunk at the application of load to the sensor head 31 to vary the pressure of the liquid 38. The pressure of the liquid 38 is detected by the sensor chip 35 to detect the load applied to the sensor head 31.
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