ELECTROSTATIC CHUCK HAVING MULTIPLE CAPACITANCE

摘要

PURPOSE: An electrostatic chuck having multiple capacitance is provided to generate uniform electrostatic force on the front surface of a substrate and to improve yield, by generating higher electrostatic force in the outer portion of the electrostatic chuck than in the center. CONSTITUTION: A conductive electrode(301) is of a disc type. A dielectric layer(302) is formed on the disc-type conductive electrode, having higher capacitance regarding a unit area at the edge of the disc-type conductive electrode than in the center. An electrode terminal(304) is connected to the conductive electrode. The dielectric layer is divided into a plurality of regions having a predetermined radius interval from the center of the disc-type conductive electrode. The dielectric constant of the dielectric layer in the respective regions becomes higher as it goes from the center region of the disc to the center.