摘要 |
PROBLEM TO BE SOLVED: To adjust only the parameter value of required minimum parameters for setting the parameter value, and to reduce the time and labor for setting the parameters by an efficient method in device simulation. SOLUTION: By a sensitivity extraction means, parameter sensitivity for indicating the level of variation in a simulation value to that in the parameter values are extracted for each parameter regarding simulation. By a changed parameter specifying means, the parameters having large parameter sensitivity are specified as the objects to be changed in the parameter value for correcting errors in a simulation value to the actual measured values.
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