| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a gas handling apparatus by which a process gas can be supplied, discharged and purged and in which a plurality of process gases can be handled by a single gas handling apparatus. SOLUTION: The gas separation box 10 comprises an enclosure 14, a first process-gas section which contains a plurality of gas sticks housed inside the enclosure and in which each gas stick controls the flow of the process gas into each gas stick, a purge-gas section which controls the flow of a purge gas and a discharge section wherein a first discharge valve which controls the outflow of the process gas or the purge gas from each gas stick is contained, a bleed valve by which the process gas can flow out in its closed position and by which the purge gas can freely flow in its open position is contained and a vacuum-generation module by which a vacuum is evacuated and by which the remaining process gas is discharged via the first discharge valve and the bleed valve is contained.</p> |
