| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning system for suppressing the occurrence of a defective article as much as possible even if abnormality occurs in a cleaning device. SOLUTION: The system is provided with the cleaning device 1 having a cleaning processing part 2 cleaning an object to be cleaned, an abnormality detecting part 3 detecting whether abnormality occurs in a cleaning processing in the cleaning processing part 2 and generating an abnormality generation signal when abnormality is detected, and notice processing parts (5 and 6) receiving the abnormality generation signal from the abnormality detecting part 3 and giving information on the effect of abnormality and with terminal equipments (7a, 7b and 8) which are outside the cleaning device 1 and receive information from the notice processing parts.
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