METHOD FOR MANUFACTURING PHOTORECEPTOR AND IMAGE FORMING DEVICE MOUNTING THE PHOTORECEPTOR

摘要

PROBLEM TO BE SOLVED: To prevent peeling of films. SOLUTION: A photoconductive layer 4 is formed on a conductive substrate 2 and an amorphous layer made of silicon carbide (SiC) or carbon (C) is formed thereon by a glow discharge method. Then the process of subjecting the amorphous layer to etching treatment by producing plasma in a gas containing fluorine while incorporating fluorine atoms by 12 to 35 atomic % into the film and then the process of subjecting the film to bombard treatment are repeated by a plurality of times to form a surface protective layer 5.