| 摘要 |
PROBLEM TO BE SOLVED: To achieve high level position detection without performing any pat tern matching in the direction of rotation even when an objects to be compared is arranged in a posture including position deviation in the direction of rotation. SOLUTION: Position deviation values (X1, Y1) between a reference image (dotted line) and a rotating image (solid line) obtained by rotating this reference image only at an angle Q are calculated based on the pattern patching of those images, and the 1st alignment point A1 is specified based on the position deviation values (X1, Y1) and the already known angle Q of rotation. Then, the pattern matching of an image to be compared obtained by imaging an object to be compared arranged in a posture including the position deviation in the direction of rotation and the reference image is operated by using the 1st alignment point A1 as a reference so that any position error to be detected can be minimized. |
