FOCUSED ION BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To use a compact and inexpensive Penning type inert element ion beam device as one for removing a remnant layer, a crushed layer formed on the surface of a sample by irradiation of focused ion beam device. SOLUTION: A Penning type inert element ion beam device fitted to the focused ion beam device is let to be provided with two motion states of an operation state of coming near a sample and irradiating an inert element beam on it and of a sheltering state of getting away from the sample and not irradiating the inert element ion beam on it.