| 摘要 |
<p>A ferroelectric thin film, characterized in that it exhibits a layered crystal structure containing oxygen (O) and at least carbon, strontium (Sr), bismuth (Bi), tantalum (Ta) and niobium (Nb), has an empirical formula of SrBiyTa2O9±d or SrxBiy(Ta, Nb)2O9±d, provided that 0.90 ≤ x < 1.00, 1.70 < y ≤ 3.20, 0 ≤ d ≤ 1.00, and has a carbon content of 5 at % or less. The ferroelectric thin film has a composition range which is most suitable for providing good remanence polarization characteristics and also has a bismuth based layered crystal structure exhibiting high reliability.</p> |
