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发明名称
CONFOCAL WAFER-INSPECTION SYSTEM
摘要
申请公布号
IL146174(D0)
申请公布日期
2002.07.25
申请号
IL20010146174
申请日期
2001.10.25
申请人
INSPECTECH LTD.
发明人
分类号
G01B11/02;G01B11/06;G01B11/24;G01N21/95;G02B21/00;H01L21/60;H01L21/66;(IPC1-7):G02B
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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