发明名称 Method for manufacturing a diamond cylinder array having dents therein
摘要 A cylinder array of diamond having a dent in its cylinder top face is manufactured by subjecting a cylinder array of diamond to a plasma etching.
申请公布号 US2002096107(A1) 申请公布日期 2002.07.25
申请号 US20010932833 申请日期 2001.08.17
申请人 FUJISHIMA AKIRA;MASUDA HIDEKI 发明人 FUJISHIMA AKIRA;MASUDA HIDEKI
分类号 C23C16/04;C23C16/27;C23C16/56;H01J9/02;(IPC1-7):C30B23/00;C30B25/00;C30B28/12;C30B28/14 主分类号 C23C16/04
代理机构 代理人
主权项
地址