发明名称 |
Method for manufacturing a diamond cylinder array having dents therein |
摘要 |
A cylinder array of diamond having a dent in its cylinder top face is manufactured by subjecting a cylinder array of diamond to a plasma etching.
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申请公布号 |
US2002096107(A1) |
申请公布日期 |
2002.07.25 |
申请号 |
US20010932833 |
申请日期 |
2001.08.17 |
申请人 |
FUJISHIMA AKIRA;MASUDA HIDEKI |
发明人 |
FUJISHIMA AKIRA;MASUDA HIDEKI |
分类号 |
C23C16/04;C23C16/27;C23C16/56;H01J9/02;(IPC1-7):C30B23/00;C30B25/00;C30B28/12;C30B28/14 |
主分类号 |
C23C16/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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