| 摘要 |
PURPOSE: An apparatus for detecting alignment of a wafer is provided to make the wafer properly settled in a charger and not broken when the charger holds the wafer and to guarantee that the charger can hold the wafer, by aligning a flat zone of the wafer through a sensor. CONSTITUTION: A pair of align rollers(108) rotate on the lower portion of a plurality of wafers(102). The align rollers align the flat zone of the wafers, in parallel with each other and at a regular interval. The first sensor forms a light path at a predetermined distance from the lower portion of the flat zone of the wafer, positioned between the align rollers and composed of a light emitting unit and a light receiving unit. The second sensor forms a light path at a predetermined distance from the lower portion of the flat zone of the wafer, positioned between the align rollers and separated from the first sensor by a predetermined interval, wherein the light path formed by the second sensor is in parallel with the light path formed by the first sensor.
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