DEVICE AND METHOD FOR TREATMENT

摘要

A device and a method for treatment, wherein a first channel (30) is formed in the surface of a first diffusion plate (21) on a gas inlet tube (27) side and a recessed part (32) is formed in the surface thereof on an electrode plate (19) side, the first channel (30) communicates with the recessed part (32) through a plurality of communication ports (31), the first channel (30) and the communication ports (31) form a gas flow passage (L) leading from a gas inlet tube (27) to the recessed part (32), and treatment gas fed from the gas inlet tube (27) is fed diffusely into a hollow part formed between the recessed part (32) and the electrode plate (19) through the gas flow passage (L).