| 摘要 |
The present invention includes a communication system, where devices communicate via an industrial network. A first device communicates with a second device via one or more input/output controller modules and/or controllers coupled to the industrial network. In the semiconductor industry, for example, the first device may be a CMP device and the second device may be automated material handling system (AMHS) equipment, which communicate via the industrial network and data transmission devices. The CMP device and the AMHS equipment may be coupled to the industrial network via one or more input/output controller modules and/or controllers. The industrial network may include DeviceNet(TM), Ethernet, and/or ProfiBus. Thus, the present invention substantially improves device to device communication, installation, maintenance, diagnostics, and repair.
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