| 摘要 |
PURPOSE:To elevate a generating rate of initial crack at machining start point and to improve the machining speed and precision in executing splitting of brittle material with use of laser beam. CONSTITUTION:Generation of an initial crack C is executed while simultaneously irradiating two positions P1, P2 at least near the edge of a work W with laser beam, successively, while plural irradiating positions S1, S2 are controlled to the prescribed position relationship or a laser output of irradiating positions S1, S2 is controlled, the laser beam is traveled along a splitting planned line L, crack C is induced. By this method, peculiar heat stress distribution is generated between laser beam irradiating positions, its tensile stress is made larger as compared to that of irradiation of one point laser beam, splitting control is improved by controlling the generating state of stress. |
